SU-8 clamped CVD graphene drum resonators

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapp...

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Bibliographic Details
Published in:arXiv.org 2016-12
Main Authors: Sunwoo, Lee, Chen, Changyao, Deshpande, Vikram V, Lee, Gwan-Hyoung, Lee, Ilkyu, Lekas, Michael, Gondarenko, Alexander, Young-Jun, Yu, Shepard, Kenneth, Kim, Philip, Hone, James
Format: Article
Language:English
Subjects:
Chemical vapor deposition
Clamping
Electrical measurement
Graphene
Nanoelectromechanical systems
Organic chemistry
Performance enhancement
Resonators
Signal processing
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Summary:Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition (CVD) graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, this resonator is highly strained, indicating its potential in strain engineering for performance enhancement.
ISSN:2331-8422
DOI:10.48550/arxiv.1612.04279