Heat Treatment of Nanocrystalline ZnO and AZO Films Grown by Pulsed Laser Deposition

Repeated heating and cooling of the pulsed laser as-deposited ZnO and Aluminium doped ZnO (AZO) films at temperatures below the deposition temperature modifies their structural, optical and electrical properties while maintaining the c-axis orientation. Heat treatment affects the AZO films only slig...

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Bibliographic Details
Published in:Sensors & transducers 2010-02, Vol.113 (2), p.150
Main Authors: Dubey, K C, Mishra, Dharmendra, Srivastava, Anchal, Shukla, R K
Format: Article
Language:English
Subjects:
Atomic layer epitaxy
Glass substrates
Grain size
Molecular beam epitaxy
Organic chemicals
Organic light emitting diodes
Semiconductors
Thin films
Zinc oxides
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Summary:Repeated heating and cooling of the pulsed laser as-deposited ZnO and Aluminium doped ZnO (AZO) films at temperatures below the deposition temperature modifies their structural, optical and electrical properties while maintaining the c-axis orientation. Heat treatment affects the AZO films only slightly and the minimum electrical resistivity occurs for 2at% Al doped film. The electrical resistivity of undoped ZnO film decreases by a factor of more than half after heating. Unlike asdeposited films the lattice constant decreases linearly with increased Al doping and the maximum grain size is observed at 2at% Al doping. Absorption edges of the heat treated films show a small red shift in comparison as-deposited films. Interestingly, for heat treated films minimum resistivity and the largest grain size both occur at 2at%Al doping in ZnO. [PUBLICATION ABSTRACT]
ISSN:2306-8515
1726-5479