High-reflectivity, high-Q micromechanical membranes via guided resonances for enhanced optomechanical coupling

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mech...

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Bibliographic Details
Published in:arXiv.org 2011-10
Main Authors: Bui, Catvu H, Zheng, Jiangjun, Hoch, S W, Lee, Lennon Y T, Harris, J G E, Chee Wei Wong
Format: Article
Language:English
Subjects:
Cooling effects
Coupling
Crystal structure
Membranes
Photonic crystals
Q factors
Reflectance
Online Access:Get full text
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Summary:Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064 nm, leading to a ~ 4\times increase in reflectivity while preserving high mechanical Q factors of up to ~ 5 \times 10^6. The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects.
ISSN:2331-8422
DOI:10.48550/arxiv.1110.3625