Critical role of the sample preparation in experiments using piezoelectric actuators inducing uniaxial or biaxial strains

We report on a systematic study of the stress transferred from an electromechanical piezo-stack into GaAs wafers under a wide variety of experimental conditions. We show that the strains in the semiconductor lattice, which were monitored in situ by means of X-ray diffraction, are strongly dependent...

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Bibliographic Details
Published in:arXiv.org 2013-09
Main Authors: Butkovicova, D, Marti, X, Saidl, V, Schmoranzerova-Rozkotova, E, Wadley, P, Holy, V, Nemec, P
Format: Article
Language:English
Subjects:
Axial stress
Parameter identification
Piezoelectric actuators
Piezoelectricity
Substrates
X-ray diffraction
Online Access:Get full text
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Summary:We report on a systematic study of the stress transferred from an electromechanical piezo-stack into GaAs wafers under a wide variety of experimental conditions. We show that the strains in the semiconductor lattice, which were monitored in situ by means of X-ray diffraction, are strongly dependent on both the wafer thickness and on the selection of the glue which is used to bond the wafer to the piezoelectric actuator. We have identified an optimal set of parameters that reproducibly transfers the largest distortions at room temperature. We have studied strains produced not only by the frequently used uniaxial piezostressors but also by the biaxial ones which replicate the routinely performed experiments using substrate-induced strains but with the advantage of a continuously tunable lattice distortion. The time evolution of the strain response and the sample tilting and/or bending are also analyzed and discussed.
ISSN:2331-8422
DOI:10.48550/arxiv.1309.0944