Investigation of quantum-dimensional structure parameters by X-ray optical, scanning tunneling and transmission electron microscopy

Application of the two-wavelength X-ray reflectometry to exploration of Ge/Si(001) hereostructures with dense chains of stacked Ge quantum dots is presented

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Bibliographic Details
Published in:arXiv.org 2013-04
Main Authors: Touryanski, A G, Senkov, V M, Gizha, S S, Arapkina, L V, Chapnin, V A, Chizh, K V, Kalinushkin, V P, Storozhevykh, M S, Uvarov, O V, Yuryev, V A
Format: Article
Language:English
Subjects:
Electrons
Germanium
Quantum dots
Silicon
Online Access:Get full text
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Description
Summary:Application of the two-wavelength X-ray reflectometry to exploration of Ge/Si(001) hereostructures with dense chains of stacked Ge quantum dots is presented
ISSN:2331-8422