Design and Fabrication of Micromachined Resonators

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This wo...

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Bibliographic Details
Published in:arXiv.org 2012-02
Main Authors: Chaudhuri, Ritesh Ray, Basu, Joydeep, Bhattacharyya, Tarun Kanti
Format: Article
Language:English
Subjects:
CMOS
Computer simulation
Finite element method
Integrated circuits
Microelectromechanical systems
Micromachining
Power consumption
Q factors
Resonators
Signal processing
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Summary:Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.
ISSN:2331-8422