Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties

•The sensing areas are varied to investigate the relation between sensing materials and electrodes.•The effect of the interface resistance and the intergrain resistance are analyzed by linear regression.•The performance of the downsizing gas sensor is greatly influenced by the interface resistance....

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Published in:Sensors and actuators. B, Chemical Chemical, 2017-09, Vol.248, p.949-956
Main Authors: Song, Young Geun, Shim, Young-Seok, Kim, Sangtae, Han, Soo Deok, Moon, Hi Gyu, Noh, Myoung Sub, Lee, Kwangjae, Lee, Hae Ryong, Kim, Jin-Sang, Ju, Byeong-Kwon, Kang, Chong-Yun
Format: Article
Language:English
Subjects:
Chemical sensors
Detection
Downsizing
Electrodes
Gas detectors
Gas sensor
Gas sensors
In2O3 nanocolumn
Indium oxides
Interdigitated electrodes
Internet of Things
Metal oxides
Miniaturization
Organic chemistry
Regression analysis
Response time
Semiconductors
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Summary:•The sensing areas are varied to investigate the relation between sensing materials and electrodes.•The effect of the interface resistance and the intergrain resistance are analyzed by linear regression.•The performance of the downsizing gas sensor is greatly influenced by the interface resistance. We report the highly sensitive and selective downsized gas sensors for the IoT application. Sensing areas of Pt-interdigitated electrodes (IDEs) were varied to investigate the relation between sensing materials and electrodes. In2O3 nanocolumns were deposited on the pre-patterned Pt IDEs using glancing angle deposition (GLAD). The effect of the interface resistance between electrodes and sensing materials, and the intergrain resistance between nanocolumns is analyzed by linear regression at different sensing area and incident angle of GLAD. In2O3 (angle: 85°, sensing area: 0.3mm×0.3mm) nanocolumns with double Schottky barriers show the highest response and selectivity with fast response time of 10s to VOCs among the samples fabricated in this study. The analysis reveals that the intrinsic response of In2O3 (angle: 85°, sensing area: 0.3mm×0.3mm) nanocolumns are dominantly affected by intergrain resistance, resulting in a high response. Our demonstration for the fundamental aspect of downsizing gas sensor makes an important contribution to the chemical sensor field with broad interest.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2017.02.035