Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20 µm per hour

We report pulsed laser deposition of high-quality crystalline yttrium aluminium oxide and yttrium gallium oxide with a growth rate approaching 20 μm per hour by using an excimer laser operating at a repetition rate of 100 Hz. This result demonstrates the capability of PLD at 100 Hz for upscaling dep...

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Published in:Surface & coatings technology 2018-06, Vol.343, p.7
Main Authors: Grant-Jacob, James A, Beecher, Stephen J, Prentice, Jake J, Shepherd, David P, Mackenzie, Jacob I, Eason, Robert W
Format: Article
Language:English
Subjects:
Aluminum oxide
Composition effects
Crystal structure
Crystallinity
Excimer lasers
Excimers
Gallium oxides
Lasers
Optics
Pulsed laser deposition
Pulsed lasers
Refractivity
Repetition
Substrates
Thin films
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creator Grant-Jacob, James A
Beecher, Stephen J
Prentice, Jake J
Shepherd, David P
Mackenzie, Jacob I
Eason, Robert W
description We report pulsed laser deposition of high-quality crystalline yttrium aluminium oxide and yttrium gallium oxide with a growth rate approaching 20 μm per hour by using an excimer laser operating at a repetition rate of 100 Hz. This result demonstrates the capability of PLD at 100 Hz for upscaling deposition speeds to a rate that is industrially relevant. In addition, we show that use of this high repetition rate can cause additional heating of the substrate, which in turn affects the film composition. This effect is used as an additional control parameter on the composition, and thus refractive index, of the grown material.
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subjects Aluminum oxide
Composition effects
Crystal structure
Crystallinity
Excimer lasers
Excimers
Gallium oxides
Lasers
Optics
Pulsed laser deposition
Pulsed lasers
Refractivity
Repetition
Substrates
Thin films
title Pulsed laser deposition of crystalline garnet waveguides at a growth rate of 20 µm per hour
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