Composition and structure of Si-doped NiTi with a complex surface profile

The paper presents Auger spectroscopy and electron microscopy data on the elemental composition and structure of NiTi specimens with blind holes doped with Si through plasma immersion ion implantation. The data demonstrate how silicon is distributed through the depth of NiTi from its front surface a...

Full description

Saved in:
Bibliographic Details
Main Authors: Slabodchikov, Vladimir A., Ovchinnikov, Stanislav V., Kuznetsov, Vladimir M.
Format: Conference Proceeding
Language:English
Subjects:
Auger spectroscopy
Composition
Intermetallic compounds
Ion implantation
Nickel titanides
Silicon
Submerging
Thickness measurement
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The paper presents Auger spectroscopy and electron microscopy data on the elemental composition and structure of NiTi specimens with blind holes doped with Si through plasma immersion ion implantation. The data demonstrate how silicon is distributed through the depth of NiTi from its front surface and along the side of its hole. The upper layer formed upon treatment is shown to be amorphous, and its thickness measuring several tens of nanometers is about two times larger on the side surface of the hole than on the front surface.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5013883