Diffusivity of the interstitial hydrogen shallow donor in In2O3

• Published in: Journal of applied physics 2018-04, Vol.123 (16)
• Main Authors: Qin, Ying, Weiser, Philip, Villalta, Karla, Stavola, Michael, Fowler, W. Beall, Biaggio, Ivan, Boatner, Lynn
• Format: Article
• Language: English
• Subjects: Absorption spectra; Alignment; Applied physics; Diffusivity; Indium oxides; Polarized light; Time constant
• ISSN: 0021-8979; 1089-7550
• DOI: 10.1063/1.4995593

Hydrogen has been found to be an n-type dopant in In2O3 that gives rise to unintentional conductivity. An infrared (IR) absorption line observed at 3306 cm−1 has been assigned to the Hi + center. Two types of experiments have been performed to determine the diffusivity of Hi + in In2O3 from its IR absorption spectra. (i) At temperatures near 700 K, the O-H line at 3306 cm−1 has been used to determine the diffusivity of Hi + from its in-diffusion and out-diffusion behaviors. (ii) At temperatures near 160 K, stress has been used to produce a preferential alignment of the Hi + center that has been detected in IR absorption experiments made with polarized light. With the help of theory, the kinetics with which a stress-induced alignment can be produced yield the time constant for a single jump of the Hi + center and also the diffusivity of Hi + near 160 K. The combination of the diffusivity of Hi + found near 700 K by mass-transport measurements and that found near 160 K from the time constant for a single Hi + jump determines the diffusivity for Hi + over eleven decades!