Multi-fluid simulation models for inductively coupled plasma sources

A numerical simulation model for Inductively Coupled Plasma (ICP) sources and its implementation in the USim fluid-plasma software is presented. The electric field from the external antenna is solved using the vector potential equation with a variable dielectric constant. Plasma generation and speci...

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Main Authors: Kundrapu, Madhusudhan, Veitzer, Seth A., Stoltz, Peter H., Beckwith, Kristian R. C., Smith, Jonathan
Format: Conference Proceeding
Language:English
Subjects:
Computer simulation
Inductively coupled plasma
Multifluid equations
Plasma
Simulation
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Veitzer, Seth A.
Stoltz, Peter H.
Beckwith, Kristian R. C.
Smith, Jonathan
description A numerical simulation model for Inductively Coupled Plasma (ICP) sources and its implementation in the USim fluid-plasma software is presented. The electric field from the external antenna is solved using the vector potential equation with a variable dielectric constant. Plasma generation and species transport are solved using a set of collisional multi-fluid equations in diffusion form. USim results are benchmarked with experiments from the literature. Density and temperature distributions show good agreement both qualitatively and quantitatively with the measurements.
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source American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)
subjects Computer simulation
Inductively coupled plasma
Multifluid equations
Plasma
Simulation
title Multi-fluid simulation models for inductively coupled plasma sources
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