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Investigations into the electrochemical etching process of p-type silicon using ethanol-surfactant solutions
In this work, the electrochemical etching of p-type silicon was performed in aqueous ethanol-surfactant solutions and the dependence of morphology and luminescent properties of porous silicon with respect to the etching parameters and silicon resistivities have been studied. The obtained porous sili...
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | In this work, the electrochemical etching of p-type silicon was performed in aqueous ethanol-surfactant solutions and the dependence of morphology and luminescent properties of porous silicon with respect to the etching parameters and silicon resistivities have been studied. The obtained porous silicon structures have been studied using various characterisation techniques such as SEM (Scanning Electron Microscopy) and Photoluminescence (PL) spectroscopy. |
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ISSN: | 0094-243X 1551-7616 |
DOI: | 10.1063/1.5002517 |