Automatic End-point Detection for Ar+ Milling of FIB in situ and ex situ Lift-out Specimens from Semiconductor Devices

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Bibliographic Details
Published in:Microscopy and microanalysis 2018-08, Vol.24 (S1), p.854-855
Main Authors: Bonifacio, C.S., Giannuzzi, L.A., Nowakowski, P., Harbaugh, J.T., Campin, M., Boccabella, M., Ray, M., Fischione, P.E.
Format: Article
Language:English
Subjects:
Analytical and Instrumentation Science Symposia
Semiconductor devices
The FIB-SEM Laboratory: Sample Preparation and Beyond
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927618004762