Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens

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Bibliographic Details
Published in:Microscopy and microanalysis 2018-08, Vol.24 (S1), p.862-863
Main Authors: Campin, M.J., Bonifacio, C.S., Fischione, P.E.
Format: Article
Language:English
Subjects:
Analytical and Instrumentation Science Symposia
Ion beams
The FIB-SEM Laboratory: Sample Preparation and Beyond
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927618004804