Sample preparation for aberration-corrected microscopy of high-quality TEM specimens of advanced integrated circuits

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Bibliographic Details
Published in:Microscopy and microanalysis 2018-08, Vol.24 (S1), p.150-151
Main Authors: Bonifacio, C.S., Campin, M., McIlwrath, K., Ray, M., Fischione, P.E.
Format: Article
Language:English
Subjects:
Analytical and Instrumentation Science Symposia
Atomic-scale Functional Imaging in Aberration-corrected Electron Microscopy
Integrated circuits
Sample preparation
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927618001241