Utilizing Low-Dose Transmission Electron Microscopy for Structure and Defect Identification in Group III - Nitride Electronic Devices

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Bibliographic Details
Published in:Microscopy and microanalysis 2018-08, Vol.24 (S1), p.1972-1973
Main Authors: Specht, Petra, Luysberg, Martina, Chavez, J., Weatherford, T.R., Anderson, T.J., Koehler, A.D., Kisielowski, C.
Format: Article
Language:English
Subjects:
Electronic devices
Electronic equipment
Modulating Electron Beams in Space and Time to Probe for Structure and Function of Soft and Hard Matter
Physical Science Symposia
Transmission electron microscopy
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927618010346