Applications of Focused Ion Beam Using FEI DualBeam DB235: How Deep Is How Small a Hole? & How to Drill It Deeper & Smaller?

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Bibliographic Details
Published in:Microscopy and microanalysis 2003-08, Vol.9 (S02), p.886-887
Main Authors: MoberlyChan, Warren J., Sanchez, Erik J., Stark, Peter R. H., Krug, John T.
Format: Article
Language:English
Online Access:Get full text
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927603444437