EDX and Cathodoluminecence Depth Analysis in Ion-implanted SiO2 Layers

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Bibliographic Details
Published in:Microscopy and microanalysis 2003-09, Vol.9 (S03), p.104-105
Main Authors: Fitting, H.-J., Gaber, M., Barfels, T.
Format: Article
Language:English
Subjects:
Invited Papers
Silicon dioxide
Online Access:Get full text
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927603014016