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Electron Beam Induced Defects in SiO2

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Bibliographic Details
Published in:	Microscopy and microanalysis 2003-09, Vol.9 (S03), p.360-361
Main Authors:	Fitting, H.-J., Barfels, T., von Czarnowski, A., Ziems, T.
Format:	Article
Language:	English
Subjects:	Electron beams Invited Papers Silicon dioxide
Online Access:	Get full text
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