Planarization Processes for Pre-FIB Sample Preparation

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Bibliographic Details
Published in:Microscopy and microanalysis 2002-08, Vol.8 (S02), p.564-565
Main Authors: Lee, T.-C., Huang, J.-Y., Chen, L.-C., Su, D. H.-I.
Format: Article
Language:English
Subjects:
Chemical-mechanical polishing
Failure analysis
Ion beams
Sample preparation
Scanning electron microscopy
Online Access:Get full text
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927602105496