Ion temperature and gas pressure effects on the magnetized sheath dynamics during plasma immersion ion implantation

Here, a collisional magnetized plasma with finite ion temperature is considered to examine the effects of the ion temperature and gas pressure on the plasma-sheath dynamics. We use the two-fluid model of plasma-sheath where the nonlinear equations of a dynamic sheath are solved using a full implicit...

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Bibliographic Details
Published in:Physics of plasmas 2016-03, Vol.23 (3)
Main Authors: Khoram, M., Ghomi, H., Navab Safa, N.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
BOUNDARY CONDITIONS
Collision dynamics
Collision rates
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DIAGRAMS
Dynamic characteristics
ELECTRIC POTENTIAL
FINITE DIFFERENCE METHOD
Gas pressure
High voltages
Ion impact
ION IMPLANTATION
ION TEMPERATURE
IONS
Low voltage
Nonlinear equations
NONLINEAR PROBLEMS
Plasma
Plasma physics
PLASMA SHEATH
Plasma sheaths
PRESSURE DEPENDENCE
Pressure effects
Submerging
Two fluid models
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Summary:Here, a collisional magnetized plasma with finite ion temperature is considered to examine the effects of the ion temperature and gas pressure on the plasma-sheath dynamics. We use the two-fluid model of plasma-sheath where the nonlinear equations of a dynamic sheath are solved using a full implicit scheme of finite difference method along with some convenient initial and boundary conditions at the plasma center and target. It is found that the ion temperature only has a significant effect on the characteristics of low voltage sheath, while the gas pressure (collision rate) seriously affects the dynamic characteristics of the low and high voltage plasma-sheath. One can see, increasing the ion temperature in low voltage plasma-sheath causes to increase the temporal curve of the ion dose and the ion impact energy on the target, reduces the temporal curve of the sheath width, and has no any effect on the temporal curve of the ion incident angle on the target. However, rising the gas pressure in low and high voltage plasma-sheath reduces all of these temporal curves.
ISSN:1070-664X
1089-7674
DOI:10.1063/1.4944503