Nanopore fabrication and characterization by helium ion microscopy

The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused helium ion beam of a HIM is utilized to create nanopores with dia...

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Bibliographic Details
Published in:Applied physics letters 2016-04, Vol.108 (16)
Main Authors: Emmrich, D., Beyer, A., Nadzeyka, A., Bauerdick, S., Meyer, J. C., Kotakoski, J., Gölzhäuser, A.
Format: Article
Language:English
Subjects:
Applied physics
ASPECT RATIO
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
FABRICATION
Field ionization
GRAPHENE
Helium
HELIUM IONS
ION BEAMS
ION MICROSCOPES
ION MICROSCOPY
IONIZATION
NATURAL GAS FIELDS
Porosity
RESOLUTION
Scanning electron microscopy
Scanning transmission electron microscopy
Silicon nitride
SILICON NITRIDES
TRANSMISSION ELECTRON MICROSCOPY
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Summary:The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused helium ion beam of a HIM is utilized to create nanopores with diameters down to 1.3 nm. It will be demonstrated that nanopores can be milled into silicon nitride, carbon nanomembranes, and graphene with well-defined aspect ratio. To image and characterize the produced nanopores, helium ion microscopy and high resolution scanning transmission electron microscopy were used. The analysis of the nanopores' growth behavior allows inferring on the profile of the helium ion beam.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4947277