Broadband x-ray ptychography

The Born modal expansion of the cross-spectral density is used to construct a ptychographic imaging scheme appropriate for X-ray imaging using broadband partially coherent sources. The formulation of the scheme is demonstrated through a comparison with earlier work using detailed simulations. The ad...

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Bibliographic Details
Main Authors: Pradier, S. R. R., van Riessen, G., Cadenazzi, G. A., Balaur, E., Abbey, B., Quiney, H. M.
Format: Conference Proceeding
Language:English
Subjects:
Broadband
Imaging
Thickness
Thin films
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Online Access:Get full text
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Description
Summary:The Born modal expansion of the cross-spectral density is used to construct a ptychographic imaging scheme appropriate for X-ray imaging using broadband partially coherent sources. The formulation of the scheme is demonstrated through a comparison with earlier work using detailed simulations. The advantages of the broadband ptychographic imaging approach are discussed in the context of the determination of the nanoroughness and thickness profile of thin films.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.4937542