Simulation of nanocolumn formation in a plasma environment

Recent experiments and kinetic Monte Carlo (KMC) simulations [H. Greve et al., Appl. Phys. Lett. 88, 123103 (2006), L. Rosenthal et al., J. Appl. Phys. 114, 044305 (2013)] demonstrated that physical vapor co-deposition of a metal alloy (Fe-Ni-Co) and a polymer (Teflon AF) is a suitable method to gro...

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Bibliographic Details
Published in:Journal of applied physics 2015-01, Vol.117 (1)
Main Authors: Abraham, J. W., Kongsuwan, N., Strunskus, T., Faupel, F., Bonitz, M.
Format: Article
Language:English
Subjects:
Applied physics
Computer simulation
Feasibility studies
Iron
Metal particles
Nickel
Polytetrafluoroethylene
Simulation
Substrates
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Summary:Recent experiments and kinetic Monte Carlo (KMC) simulations [H. Greve et al., Appl. Phys. Lett. 88, 123103 (2006), L. Rosenthal et al., J. Appl. Phys. 114, 044305 (2013)] demonstrated that physical vapor co-deposition of a metal alloy (Fe-Ni-Co) and a polymer (Teflon AF) is a suitable method to grow magnetic nanocolumns in a self-organized one-step process. While only thermal sources have been used so far, in this work, we analyze the feasibility of this process for the case of a sputtering source. For that purpose, we extend our previous simulation model by including a process that takes into account the influence of ions impinging on the substrate. The simulation results predict that metal nanocolumn formation should be possible. Furthermore, we show that the effect of ions that create trapping sites for the metal particles is to increase the number of nanocolumns.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4905255