A Miniature Fiber-Optic Microphone Based on an Annular Corrugated MEMS Diaphragm

A miniature fiber-optic microphone (FOM) based on a periodic corrugated microelectro-mechanical-system (MEMS) diaphragm has been developed in this paper. A micro Fabry-Perot cavity is an acoustic sensor structure made up of a single-mode fiber(SMF) end face and a MEMS diaphragm. The achieved signal-...

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Bibliographic Details
Published in:Journal of lightwave technology 2018-11, Vol.36 (22), p.5224-5229
Main Authors: Lu, Xueqi, Wu, Yu, Gong, Yuan, Rao, Yunjiang
Format: Article
Language:English
Subjects:
Acoustic noise
Acoustics
Cavity resonators
Diaphragms (mechanics)
Fabry–Perot
Fiber optics
Fiber-optic microphone
Frequency response
Interference
MEMS diaphragm
Microelectromechanical systems
Micromechanical devices
Microphones
Noise levels
Optical fibers
Sensitivity
Silicon
Sound detecting and ranging
Sound pressure
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Summary:A miniature fiber-optic microphone (FOM) based on a periodic corrugated microelectro-mechanical-system (MEMS) diaphragm has been developed in this paper. A micro Fabry-Perot cavity is an acoustic sensor structure made up of a single-mode fiber(SMF) end face and a MEMS diaphragm. The achieved signal-to-noise ratio (SNR) of the FOM is 79.08 dB under the sound pressure of 37.76 mPa at the 1 kHz acoustic signal, and the corresponding minimum detectable pressure is as low as 2.97 μPa/Hz 1/2 . In addition, the FOM has a flat frequency response and a linear sound pressure response within the audible sound frequency range. These results indicate that this FOM shows the extreme sensitivity and miniature size, making it a promising technology for acoustic detection.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2018.2868964