A novel on-chip three-dimensional micromachined calorimeter with fully enclosed and suspended thin-film chamber for thermal characterization of liquid samples

A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and in...

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Bibliographic Details
Published in:Biomicrofluidics 2014-05, Vol.8 (3), p.034101
Main Authors: Davaji, Benyamin, Jeong Bak, Hye, Chang, Woo-Jin, Hoon Lee, Chung
Format: Article
Language:English
Subjects:
Differential scanning calorimetry
Diffusivity
Heat measurement
Micromachining
Regular
Silicon nitride
Temperature sensors
Thermal diffusivity
Thermodynamic properties
Thin films
Time lag
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Summary:A microfabricated calorimeter (μ-calorimeter) with an enclosed reaction chamber is presented. The 3D micromachined reaction chamber is capable of analyzing liquid samples with volume of 200 nl. The thin film low-stress silicon nitride membrane is used to reduce thermal mass of the calorimeter and increase the sensitivity of system. The μ-calorimeter has been designed to perform DC and AC calorimetry, thermal wave analysis, and differential scanning calorimetry. The μ-calorimeter fabricated with an integrated heater and a temperature sensor on opposite sides of the reaction chamber allows to perform thermal diffusivity and specific heat measurements on liquid samples with same device. Measurement results for diffusivity and heat capacitance using time delay method and thermal wave analysis are presented.
ISSN:1932-1058
1932-1058
DOI:10.1063/1.4875656