Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer

Highly sensitive detection tools that measure pressure and force are essential in palpation as well as real-time pressure monitoring in biomedical applications. So far, measurement has mainly been done by force sensing resistors and field effect transistor (FET) sensors for monitoring biological pre...

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Bibliographic Details
Published in:Applied physics letters 2014-03, Vol.104 (12)
Main Authors: Choi, Wook, Lee, Junwoo, Kyoung Yoo, Yong, Kang, Sungchul, Kim, Jinseok, Hoon Lee, Jeong
Format: Article
Language:English
Subjects:
Applied physics
Biomedical materials
Biomonitoring
Detection
Field effect transistors
Piezoelectricity
Polydimethylsiloxane
Pressure sensors
Resistors
Semiconductor devices
Sensitivity enhancement
Sensors
Silicone resins
Thin films
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Summary:Highly sensitive detection tools that measure pressure and force are essential in palpation as well as real-time pressure monitoring in biomedical applications. So far, measurement has mainly been done by force sensing resistors and field effect transistor (FET) sensors for monitoring biological pressure and force sensing. We report a pressure sensor by the combination of a piezoelectric sensor layer integrated with a microstructured Polydimethylsiloxane (μ-PDMS) layer. We propose an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source that is used in FET sensors, by incorporating a microstructured PDMS layer in a piezoelectric sensor. By measuring the directly induced electrical charge from the microstructure-enhanced piezoelectric signal, we observed a 3-fold increased sensitivity in a signal response. Both fast signal relaxation from force removal and wide dynamic range from 0.23 to 10 kPa illustrate the good feasibility of the thin film piezoelectric sensor for mimicking human skin.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4869816