Ultrahigh Q-frequency product for optomechanical disk resonators with a mechanical shield

We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q×f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q×f of 1013 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source...

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Bibliographic Details
Published in:Applied physics letters 2013-12, Vol.103 (24)
Main Authors: Nguyen, D. T., Baker, C., Hease, W., Sejil, S., Senellart, P., Lemaître, A., Ducci, S., Leo, G., Favero, I.
Format: Article
Language:English
Subjects:
Applied physics
Clamping
Computer simulation
Cryogenic temperature
Disks
Heterostructures
Q factors
Resonators
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Summary:We report on optomechanical GaAs disk resonators with ultrahigh quality factor-frequency product Q×f. Disks standing on a simple pedestal exhibit GHz mechanical breathing modes attaining a Q×f of 1013 measured under vacuum at cryogenic temperature. Clamping losses are found to be the dominant source of dissipation. An improved disk resonator geometry integrating a shield within the pedestal is then proposed, and its working principles and performances are investigated by numerical simulations. For dimensions compatible with fabrication constraints, the clamping-loss-limited Q reaches 107–109 corresponding to Q×f equals 1016–1018. This shielded pedestal approach applies to any heterostructure presenting an acoustic mismatch.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4846515