Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement

We propose a simple and compact reading head with the Littrow configuration that will increase measurement range and reduce the complexity of a two-dimensional grating-based interferometer. The reading head contains only a beam splitter, two polarizing beam splitter modules, and two mirrors. The the...

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Bibliographic Details
Published in:Applied optics (2004) 2018-11, Vol.57 (31), p.9455
Main Authors: Lv, Qiang, Liu, Zhaowu, Wang, Wei, Li, Xiaotian, Li, Shuo, Song, Ying, Yu, Hongzhu, Bayanheshig, Li, Wenhao
Format: Article
Language:English
Subjects:
Configurations
Displacement
Rangefinding
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Summary:We propose a simple and compact reading head with the Littrow configuration that will increase measurement range and reduce the complexity of a two-dimensional grating-based interferometer. The reading head contains only a beam splitter, two polarizing beam splitter modules, and two mirrors. The theoretical resolutions in two directions are 0.27 nm and 0.18 nm, respectively. In comparison with a dual-frequency laser interferometer, the proposed interferometer can measure displacement from 3 nm to 10 mm with high accuracy. The 3σ values in two directions for the difference are 1.67 nm and 1.35 nm for a displacement of 9 nm. Repeatability for a displacement of 1 μm is better than 2 nm.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.57.009455