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Novel Band-to-Band Tunneling Body Contact (BTBC) Structure to Suppress the Floating- Body Effect in a Vertical-Cell DRAM

A vertical cell is the best structure for optimizing dynamic random access memory size. However, this structure has a fatal weakness called the floating-body effect (FBE). In this letter, we propose a new vertical structure to suppress FBE and short-channel effects, and successfully demonstrate the...

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Bibliographic Details
Published in:IEEE electron device letters 2018-12, Vol.39 (12), p.1860-1863
Main Authors: Cho, Youngseung, Choi, Pyeongho, Hyeon, Younghwan, Song, Junhwa, Hwang, Yoosang, Choi, Byoungdeog
Format: Article
Language:English
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Summary:A vertical cell is the best structure for optimizing dynamic random access memory size. However, this structure has a fatal weakness called the floating-body effect (FBE). In this letter, we propose a new vertical structure to suppress FBE and short-channel effects, and successfully demonstrate the structure through simulation. In the new structure, the band-to-band tunnel diode body contact is built in the source region, which effectively releases the accumulated body carriers. In the buried contact, a heavily doped \text{p}^{+} layer is introduced next to the \text{n}^{+} source region, effectively connecting the body and source through tunneling. Furthermore, the proposed structure shows an extremely high ON-state to OFF-state current ( \text{I}_{ON}/\text{I}_{OFF}) ratio of ~10 7 for a channel length of 100 nm.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2018.2874303