A Device for Mechanical Testing of Elements of Micro- and Nanosystems

For the mechanical testing of elements of micro- and nanosystems, we propose a device based on an electrodynamic actuator, which creates regulated forces within the range 10 –3 –1 N. The minimum recorded change in the geometry of a specimen under the load is equal to 0.3 μm. The actuator can be used...

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Bibliographic Details
Published in:Measurement techniques 2018-11, Vol.61 (8), p.802-805
Main Author: Postnikov, А. V.
Format: Article
Language:English
Subjects:
Actuators
Analytical Chemistry
Bending fatigue
Characterization and Evaluation of Materials
Compression tests
Fatigue tests
Measurement Science and Instrumentation
Mechanical Measurements
Mechanical properties
Mechanical tests
Microbeams
Micrometers
Physical Chemistry
Physics
Physics and Astronomy
Stiffness
Thin films
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Summary:For the mechanical testing of elements of micro- and nanosystems, we propose a device based on an electrodynamic actuator, which creates regulated forces within the range 10 –3 –1 N. The minimum recorded change in the geometry of a specimen under the load is equal to 0.3 μm. The actuator can be used for tensile, bending, compression, and fatigue tests of the specimens. By using the actuator, we can find the mechanical characteristics of thin films, wires, and microbeams whose length varies from several micrometers to several millimeters. The accessibility of the actuator and its zero stiffness simplify the procedure of measurements.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-018-1505-3