Sol-gel derived aluminium doped zinc oxide thin films: A view of aluminium doping effect on physicochemical and NO^sub 2^ sensing properties

Aluminium doped ZnO (AZO) thin films have been synthesized by using a sol-gel spin coating method. The effect of Al-doping on physicochemical and NO2 sensing properties of the AZO thin films were studied. The structural and compositional analysis confirms the phase formation of ZnO and substitution...

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Bibliographic Details
Published in:Journal of alloys and compounds 2019-02, Vol.775, p.466
Main Authors: Nimbalkar, AR, Patil, NB, Ganbavle, VV, Mohite, SV, Madhale, KV, Patil, MG
Format: Article
Language:English
Subjects:
Aluminum
Coating effects
Detection
Doping
Gas detectors
Gas sensors
Nitrogen dioxide
Sol-gel processes
Spin coating
Thin films
Zinc oxide
Zinc oxides
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Summary:Aluminium doped ZnO (AZO) thin films have been synthesized by using a sol-gel spin coating method. The effect of Al-doping on physicochemical and NO2 sensing properties of the AZO thin films were studied. The structural and compositional analysis confirms the phase formation of ZnO and substitution of aluminium atoms into zinc oxide lattice. The gas sensing performance of AZO thin films investigated at different operational temperatures towards NO2 gas. The NO2 sensing study reveals that the 2 at% AZO film sensor shows excellent gas sensing characteristics at 200 °C.
ISSN:0925-8388
1873-4669
DOI:10.1016/j.jallcom.2018.10.144