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The effects of aged Cu-Al intermetallics to electrical resistance in microelectronics packaging
A Cu-Al bonding system exists when copper wire is bonded onto an aluminum bond pad using thermosonic wire bonding technology. Aged Cu-Al bonding system was analyzed by measuring the intermetallics layer thickness and its correlation to electrical contact resistance. Result shows that the thickness o...
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Published in: | Microelectronics international 2002-08, Vol.19 (2), p.38-43 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A Cu-Al bonding system exists when copper wire is bonded onto an aluminum bond pad using thermosonic wire bonding technology. Aged Cu-Al bonding system was analyzed by measuring the intermetallics layer thickness and its correlation to electrical contact resistance. Result shows that the thickness of Cu-Al intermetallics layer grows almost linearly to aging time. The activation energy needed for Cu atoms to diffuse into Al was calculated using Fick's law; Q=129.66 kJ mole and D0=1.628×10−4 m2 s. The calculation of activation energy and impurity diffusity using Model Kidson also shows linear relationship. Electrical resistance of Cu-Al intermetallics layer was calculated from contact resistance of Cu-Al bonding system. The result shows that the electrical resistance of Cu-Al intermetallics layer increases linearly with intermetallics thickness. Its growth rate that was calculated using Model of Braunovic and Alexandrov is double of Model of Murcko. |
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ISSN: | 1356-5362 1758-812X |
DOI: | 10.1108/13565360210427889 |