Optical density of nanocomposite ZnO films doped with Au, Al, Cu

This article presents some results concerning the oxidation of metallic Zn films as well as the films with Au, Al, Cu additives in a 9: 1 ratio. The total thickness of the initial metal films was about 100 nm. At the first stage, Zn films were deposited on quartz substrates by magnetron sputtering i...

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Main Authors: Tomaev, V. V., Polishchuk, V. A., Vartanyan, T. A.
Format: Conference Proceeding
Language:English
Subjects:
Additives
Aluminum
Copper
Gold
Magnetron sputtering
Metal films
Nanocomposites
Optical density
Oxidation
Substrates
Zinc oxide
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Polishchuk, V. A.
Vartanyan, T. A.
description This article presents some results concerning the oxidation of metallic Zn films as well as the films with Au, Al, Cu additives in a 9: 1 ratio. The total thickness of the initial metal films was about 100 nm. At the first stage, Zn films were deposited on quartz substrates by magnetron sputtering in Argon followed by doping with Au, Al, and Cu. At the second stage, the samples were heated to T ≈ 400-410 ° C in dry air. The optical density of ZnO films doped with metal in the wavelength range of 200-1100 nm was measured.
doi_str_mv 10.1063/1.5087685
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subjects Additives
Aluminum
Copper
Gold
Magnetron sputtering
Metal films
Nanocomposites
Optical density
Oxidation
Substrates
Zinc oxide
title Optical density of nanocomposite ZnO films doped with Au, Al, Cu
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