Fabrication of templates for metallic nanoantennas by STED-DLW lithography

The authors experimentally realized the idea of STED-DLW lithography and picked writing parameters for the efficient fabrication of polymeric nanostructures. Polymeric nanoantennas templates for further metallization were fabricated, plasmonic structures with the same design were created with e-beam...

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Bibliographic Details
Main Authors: Zvagelsky, R. D., Chubich, D. A., Kolymagin, D. A., Pisarenko, A. V., Vitukhnovsky, A. G.
Format: Conference Proceeding
Language:English
Subjects:
Electron beams
Lithography
Metallizing
Nanoantennas
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Summary:The authors experimentally realized the idea of STED-DLW lithography and picked writing parameters for the efficient fabrication of polymeric nanostructures. Polymeric nanoantennas templates for further metallization were fabricated, plasmonic structures with the same design were created with e-beam lithography. It was shown that obtained structures have two resonances, which correspond to different orientation of polarization.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.5089847