Surface Texture Characterization Using Optical and Tactile Combined Sensor

Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate...

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Bibliographic Details
Published in:Sensors and materials 2018, Vol.30 (5(2)), p.1091
Main Authors: Takahashi, Kenta, Abe, Takashi, Okuyama, Masanori, Noma, Haruo, Sohgawa, Masayuki
Format: Article
Language:English
Subjects:
Deformation resistance
Elastomers
Impedance
Microelectromechanical systems
Object recognition
Optical properties
Sensitivity
Sensors
Silicon substrates
Strain gauges
Surface layers
Surface roughness
Tactile
Texture
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Summary:Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.
ISSN:0914-4935
DOI:10.18494/SAM.2018.1786