Maskless lithography based on digital micromirror device (DMD) and double sided microlens and spatial filter array

• Published in: Optics and laser technology 2019-05, Vol.113, p.407-415
• Main Authors: Dinh, Duc-Hanh, Chien, Hung-Liang, Lee, Yung-Chun
• Format: Article
• Language: English
• Subjects: 3D microfabrication; Arrays; Digital mirror device (DMD); Lithography; Maskless lithography; Microlens array; Microscopes; Photoresists; Spatial filtering; Surface structure
• ISSN: 0030-3992; 1879-2545
• DOI: 10.1016/j.optlastec.2019.01.001

•A new type of maskless lithography system based on DMD has been developed.•The proposed maskless lithography system can fabricate not only 2D but also 3D structures.•A new method for 3D structure fabrication has been proposed. A new type of maskless lithography system based on digital mirror device (DMD) is proposed, constructed, and experimentally demonstrated. It includes a pin-hole array sandwiched by two microlens arrays on each side, known as double-sided microlens/spatial-filter array (D-MSFA), and aligned with a DMD. Ultraviolet (UV) light reflected by DMD is first collected by the first microlens array, filtered through the pin-hole array, and then re-focused by the second microlens array into a UV spot array. Along with an obliquely scanning method, this D-MSFA/DMD-based maskless lithography system can perform not only 2D but also 3D UV patterning. Experimental testing successfully generates complicated patterns with a minimum line-width of 3.36 μm. Direct 3D patterning and 3D microfabrication are also experimentally demonstrated on a photoresist layer. Excellent profile accuracy and surface structure qualities are observed with great potentials for future 2D and 3D microfabrication in a maskless manner.