Analysis of Electron Channeling Contrast Imaging in Scanning Electron Microscopes

In the paper, the influence factors of electron channeling contrast imaging (ECCI) on crystalline material microstructure characterization by scanning electron microscopes (SEMs) were analyzed, such as electric current, accelerating voltage and sample material’s surface conditions. It was found that...

Full description

Saved in:
Bibliographic Details
Published in:Key engineering materials 2018-04, Vol.768, p.52-58
Main Authors: Hua, Jia Jie, Zeng, Yi, Lin, Chu Сheng, Jiang, Cai Fen, Liu, Zi Wei, Zhang, Ji Mei
Format: Article
Language:English
Subjects:
Channeling
Electric potential
Electron microscopes
Grain boundaries
Image contrast
Microscopes
Scanning electron microscopy
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In the paper, the influence factors of electron channeling contrast imaging (ECCI) on crystalline material microstructure characterization by scanning electron microscopes (SEMs) were analyzed, such as electric current, accelerating voltage and sample material’s surface conditions. It was found that high current, appropriate accelerating voltage and smooth sample surface were more beneficial to obtaining an ideal channel effect pattern. In addition, the difference between the channel effect contrast and the EBSD technology was also investigated. And the results showed that the channel effect contrast image could qualitatively characterize grains with different orientations. However, it was far less sensitive than EBSD in characterizing small angle grain boundaries.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.768.52