Characterization of Structural Change of Nano-crystalline ITO Films due to Exposure to Hyperthermal Atomic Oxygen

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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Published in:Microscopy and microanalysis 2006-08, Vol.12 (S02), p.644-645
Main Authors: Li, L, Harder, R, Xu, F, Robinson, IK, Yang, JC
Format: Article
Language:English
Subjects:
Electron microscopes
Grain boundaries
Microscopy in Nanoscience and Nanotechnology
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container_title Microscopy and microanalysis
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creator Li, L
Harder, R
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Yang, JC
description Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
doi_str_mv 10.1017/S1431927606062295
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source Cambridge University Press
subjects Electron microscopes
Grain boundaries
Microscopy in Nanoscience and Nanotechnology
title Characterization of Structural Change of Nano-crystalline ITO Films due to Exposure to Hyperthermal Atomic Oxygen
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