Influence of the N2 on TiN Thin Film Grown by PLD

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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Bibliographic Details
Published in:Microscopy and microanalysis 2004-08, Vol.10 (S02), p.638-639
Main Authors: Gonzalez-Valenzuela, Cesar, Duarte-Moller, Jose Alberto, De la Cruz, Wencel, Castillon Barraza, Felipe, Diaz, J. Antonio, Cota Araiza, Leonel
Format: Article
Language:English
Subjects:
Characterization and Performance of Advanced Coatings and Thin Films
Lasers
Spectrum analysis
Thin films
Titanium
Online Access:Get full text
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Description
Summary:Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927604886173