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Silicides and local interconnections for high-performance VLSI applications

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Bibliographic Details
Published in:	IBM journal of research and development 1995-07, Vol.39 (4), p.403-417
Main Authors:	Mann, R. W., Clevenger, L. A., Agnello, P. D., White, F. R.
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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