Effect of gas mixing ratio on structural characteristics of titanium dioxide nanostructures synthesized by DC reactive magnetron sputtering

In this work, high-quality and highly pure titanium dioxide nanostructures were synthesized by a homemade dc closed-field unbalanced reactive magnetron sputtering system. The operation parameters of the magnetron sputtering system were optimized to prepare TiO2 nanostructures as thin films on glass...

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Bibliographic Details
Published in:Physica. B, Condensed matter Condensed matter, 2019-02, Vol.555, p.18-20
Main Authors: Al-Maliki, Firas J., Al-Oubidy, Esraa A.
Format: Article
Language:English
Subjects:
Anatase
Argon
Atomic force microscopy
Fourier transforms
Glass substrates
Magnetron sputtering
Nanostructure
Nanostructured materials
Nanostructures
Reactive sputtering
Substrates
Synthesis
Thin films
Titanium
Titanium dioxide
X-ray diffraction
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Summary:In this work, high-quality and highly pure titanium dioxide nanostructures were synthesized by a homemade dc closed-field unbalanced reactive magnetron sputtering system. The operation parameters of the magnetron sputtering system were optimized to prepare TiO2 nanostructures as thin films on glass substrates. These nanostructures were characterized by x-ray diffraction, atomic force microscopy and Fourier-transform infrared spectroscopy. Both anatase and rutile phases were identified. The mixing ratio of argon and oxygen (Ar:O2) gases was found very important to control the structural characteristics of the prepared nanostructures. •Highly pure anatase/rutile TiO2 nanostructures were prepared.•They were high-quality and highly pure nanostructures.•Both anatase and rutile phases were identified.•Indirect energy band gap was determined to be 3.30–3.38 eV.•Gas mixing ratio is important to control their structural characteristics.
ISSN:0921-4526
1873-2135
DOI:10.1016/j.physb.2018.11.073