FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments

Secondary ion mass spectrometry (SIMS) is a well-known technique for 3D chemical mapping at the nanoscale, with detection sensitivity in the range of ppm or even ppb. Energy dispersive X-ray spectroscopy (EDS) is the standard chemical analysis and imaging technique in modern scanning electron micros...

Full description

Saved in:
Bibliographic Details
Published in:Progress in crystal growth and characterization of materials 2019-02, Vol.65 (1), p.1-19
Main Authors: Pillatsch, Lex, Östlund, Fredrik, Michler, Johann
Format: Article
Language:English
Subjects:
3D imaging
Acceleration
Analytical chemistry
Batteries
Chemical analysis
Computer simulation
Cultural heritage
Cultural resources
Data analysis
Dwell time
Edge effect
EDS
Electron beams
Energy dispersive X ray spectroscopy
FIB
FIBSIMS
Imaging techniques
Ion beams
Ion extraction
Isotope ratios
Mapping
Mass spectrometry
Microscopes
Organic chemistry
Pressure effects
Scanning electron microscopy
Scientific imaging
Secondary ion mass spectrometry
SEM
Sensitivity
Thin films
TOF
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Secondary ion mass spectrometry (SIMS) is a well-known technique for 3D chemical mapping at the nanoscale, with detection sensitivity in the range of ppm or even ppb. Energy dispersive X-ray spectroscopy (EDS) is the standard chemical analysis and imaging technique in modern scanning electron microscopes (SEM), and related dual-beam focussed ion beam (FIBSEM) instruments. Contrary to the use of an electron beam, in the past the ion beam in FIBSEMs has predominantly been used for local milling or deposition of material. Here, we review the emerging FIBSIMS technique which exploits the focused ion beam as an analytical probe, providing the capability to perform secondary ion mass spectrometry measurements on FIBSEM instruments: secondary ions, sputtered by the FIB, are collected and selected according to their mass by a mass spectrometer. In this way a complete 3D chemical analysis with high lateral resolution
ISSN:0960-8974
1878-4208
DOI:10.1016/j.pcrysgrow.2018.10.001