Research and development of the replication process of dynamic tilting magnetic colloid soft mold deforming imprint

• Published in: Microelectronic engineering 2019-03, Vol.208, p.7-13
• Main Authors: Weng, Yung-Jin, Wang, Shi-Han
• Format: Article
• Language: English
• Subjects: Arrays; Colloiding; Computer simulation; Deformation; Deforming imprint; Dynamics; Electromagnetics; Magnetic colloid; Microstructure; Molds; Pressure; R&D; Replication; Research & development; Tensile strength; Tilting
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2019.01.008

This study aims to develop the replication process technology of the dynamic tilting magnetic colloid soft mold deforming imprint. It first designed and simulated a cross bi-axial soft mold. At the upper central area, it used a square tilting magnetic colloid to design a model of composite base. In the experiment, the unequal angle tilting magnetic colloid, dynamic unequal tensile deforming, and unequal magnetic pressure, were used for soft mold replication imprint. The unequal angle microstructure array element was obtained. The experimental results showed that satisfactory imprint conditions could be unequal angle tilting magnetic colloid soft mold, dynamic unequal tensile deforming, and unequal magnetic pressure. The proposed technology could rapidly acquire many case mold characteristics, produce the multi-change tilting microstructure array component, and effectively provide a rapid and effective technical method in the technological industry for fabricating the tilting array microstructure elements. [Display omitted] •This study developed the replication process technology for the dynamic tilting magnetic colloid soft mold deforming.•A cross bi-axial soft mold is designed and simulated.•Unequal magnetic pressure, are used for soft mold replication imprint.•This technology has the method of rapidly obtaining many case mold characteristics.