Measurement Capability of Scanning Microwave Microscopy: Measurement Sensitivity Versus Accuracy

Here, we investigate the measurement capability of a near-field scanning microwave microscope (SMM) using an atomic force microscope with several types of matching circuits for the characterization of high-permittivity dielectric materials. A fixed impedance matching circuit is generally used in SMM...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2019-06, Vol.68 (6), p.1774-1780
Main Authors: Horibe, Masahiro, Kon, Seitaro, Hirano, Iku
Format: Article
Language:English
Subjects:
Accuracy
Atomic force microscopes
Atomic force microscopy
Circuits
Dielectric permittivity
Dielectrics
Frequency measurement
Impedance
Impedance matching
Impedance measurement
interferometric circuit
matching circuit
measurement uncertainty
Microscopes
near-field scanning microwave microscopy (SMM)
Nonlinear programming
Permittivity
Permittivity measurement
Resistors
signal-to-noise ratio
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Summary:Here, we investigate the measurement capability of a near-field scanning microwave microscope (SMM) using an atomic force microscope with several types of matching circuits for the characterization of high-permittivity dielectric materials. A fixed impedance matching circuit is generally used in SMM products. In this paper, we propose two types of passive interferometer circuits for the application of SMM systems in laboratories. Both systems are useful for operators without knowledge of microwave measurements; however, they are somewhat limited in their measurement ranges and accuracy when performing high-reflection measurements in the characterization of high-permittivity dielectric materials. Thus, we investigate the stability and the accuracy of SMMs with both setups for measurements on high-permittivity dielectric materials; here, we show that an SMM with an interferometric circuit can achieve a low data distribution and a high-dynamic range, and is, therefore, capable of quantitatively characterizing high-permittivity dielectric materials over frequencies higher than approximately 8 GHz.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2018.2882937