Formation of Piezo- and Pyroelectric Matrices with the Use of Nanoprofiled Silica

In this work, a process solution for the formation of an array of piezo- and pyroelectric structures with the use of a matrix of nanoprofiled silica is demonstrated. It is proposed to use plasma etching through a hard mask of porous anodic alumina for the formation of the matrix. Nanoparticles of a...

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Bibliographic Details
Published in:Nanotechnologies in Russia 2018-11, Vol.13 (11-12), p.609-613
Main Authors: Belov, A. N., Golishnikov, A. A., Pestov, G. N., Solnyshkin, A. V., Shevyakov, V. I.
Format: Article
Language:English
Subjects:
Aluminum oxide
Chemistry and Materials Science
Devices and Products Based on Nanomaterials and Nanotechnologies
Ferroelectric materials
Ferroelectricity
Industrial and Production Engineering
Machines
Manufacturing
Materials Science
Nanoparticles
Nanotechnology
Piezoelectricity
Plasma etching
Processes
Silicon dioxide
Vinylidene
Vinylidene fluoride
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Summary:In this work, a process solution for the formation of an array of piezo- and pyroelectric structures with the use of a matrix of nanoprofiled silica is demonstrated. It is proposed to use plasma etching through a hard mask of porous anodic alumina for the formation of the matrix. Nanoparticles of a ferroelectric copolymer of vinylidene fluoride with trifluoroethylene are formed in the pores of the matrix. The results of measurements of the piezoelectric and pyroelectric responses of this structure are presented.
ISSN:1995-0780
1995-0799
DOI:10.1134/S1995078018060034