P‐65: Misty Mura Defect of OGM Products Research

The misty mura defect of OGM products seriously affects the product appearance yield. It was found that the misty mura is caused by insufficient adhesion of the photoresist. In this paper, etch and photo process conditions were optimized and verified. We found that extending the metal photo oven tim...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2019-06, Vol.50 (1), p.1477-1480
Main Authors: Yong-fei, Li, Zhong-zheng, Yang, Zong-jie, Guo, Run, Chen, Yang-jie, Li, Hai-feng, Hu, Wan-ru, Dong, Jian, Yang, Zhan-qi, Xu, Ting, Zeng, Wei-jie, Ma, You-ting, Zhang
Format: Article
Language:English
Subjects:
anneal
Annealing furnaces
misty mura
OGM
oven
photoresist
Photoresists
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Summary:The misty mura defect of OGM products seriously affects the product appearance yield. It was found that the misty mura is caused by insufficient adhesion of the photoresist. In this paper, etch and photo process conditions were optimized and verified. We found that extending the metal photo oven time and increasing temperature can significantly decrease the misty Mura level. In addition, adding anneal (140 °C, 15min) after photo oven, the misty mura can be completely alleviated without any other problems at the same time.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.13220