69‐2: Invited Paper: Improved ZnO based materials for to‐date flat panel displays

Promising approaches to improve electrical characteristics, chemical resistance, and thermal stability of the resistivity of ZnO‐based TCO thin films are investigated. The following ways were tested: a) gradient doping of ZnO grains into the synthesized TCO films by indium in order to create passiva...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2019-06, Vol.50 (1), p.977-980
Main Authors: Abduev, Aslan, Akhmedov, Akhmed, Asvarov, Abil, Belyaev, Victor
Format: Article
Language:English
Subjects:
column
Columnar structure
Diffusion coatings
doping
Flat panel displays
Gallium
Magnetron sputtering
Organic chemistry
passivation
Passivity
Photovoltaic cells
Porosity
Reagents
resistance
TCO
Thermal resistance
Thermal stability
Thin films
Transparent electrode
Zinc oxide
ZnO
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Summary:Promising approaches to improve electrical characteristics, chemical resistance, and thermal stability of the resistivity of ZnO‐based TCO thin films are investigated. The following ways were tested: a) gradient doping of ZnO grains into the synthesized TCO films by indium in order to create passivating coatings on the surface of the grains; b) preventing the oxygen diffusion into the films by suppressing the columnar structures formation; c) methods combining the above ones. It was found that in the ZnO‐based TCO films deposited by magnetron sputtering at temperature above 150°C under the presence of excess zinc in the reagent flow, a decrease in the porosity of the columnar ZnO films is observed after subsequent heat treatments in air. The introducing of In, Ga, Sn metals to the composition of the ZnO films contributes to the formation of thin surface oxide sub‐layers with passivation properties on the surface of the ZnO grains. The results of research clearly show that preventing the formation of a columnar structure in combination with the passivation of grain surfaces creates real prospects for expanding the areas of application of ZnO‐based transparent electrodes.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.13089