Development of Mass Spectrometer Using Two Rotating Electric Fields for Separation of High-Mass Ions

We developed a mass spectrometer with a novel mass-separation mechanism using two rotating electric fields (REFs). This mass spectrometer realizes a wide mass range with the continuous separation of ion beams. In principle, it has no limitation on the mass range. It can be operated stably for the de...

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Bibliographic Details
Published in:E-journal of surface science and nanotechnology 2016/05/28, Vol.14, pp.161-164
Main Authors: Anai, Yuki, Nojima, Masashi, Hotta, Masanao, Kurumi, Satoshi, Suzuki, Kaoru, Adachi, Tatsuya, Kusanagi, Takashi, Moritani, Kosuke
Format: Article
Language:English
Subjects:
Electric fields
Gallium
Ion beams
Ions
Isotopes
Mass filter
Mass spectra
Mass spectrometer
Mass spectroscopy
Rotating electric field
Rotation
Secondary ion mass spectroscopy
Separation
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Summary:We developed a mass spectrometer with a novel mass-separation mechanism using two rotating electric fields (REFs). This mass spectrometer realizes a wide mass range with the continuous separation of ion beams. In principle, it has no limitation on the mass range. It can be operated stably for the detection of high-mass ions. To estimate the mass-separation ability, we directly introduced the mass spectrometer, which consists of two REFs, to a Ga focused ion beam column. The mass spectra of Ga isotopes were obtained by sweeping the frequencies of the REFs. The peaks of the Ga isotopes were clearly separated on the mass spectra. [DOI: 10.1380/ejssnt.2016.161]
ISSN:1348-0391
1348-0391
DOI:10.1380/ejssnt.2016.161