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Lossy mode resonance optical sensors based on indium-gallium-zinc oxide thin film
[Display omitted] •IGZO thin films have been used for the fabrication of optical fiber sensors.•Both multimode and monomode D-Shaped fibers have been studied.•The polishing depth in the D-Shaped fibers has limited influence. This work discusses an application of electrically conductive and optically...
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Published in: | Sensors and actuators. A. Physical. 2019-05, Vol.290, p.20-27 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | [Display omitted]
•IGZO thin films have been used for the fabrication of optical fiber sensors.•Both multimode and monomode D-Shaped fibers have been studied.•The polishing depth in the D-Shaped fibers has limited influence.
This work discusses an application of electrically conductive and optically transparent indium-gallium-zinc oxide (IGZO) thin films for fabrication of lossy mode resonance (LMR) based optical fiber refractometers. The films have been deposited on both 200 μm in diameter multimode fused silica fiber and D-shaped fiber structure. A sensitivity of 12,929 nm/RIU was obtained in the refractive index range between 1.39 and 1.42. In case of D-shaped fiber structure the effect of polishing depth on the LMR phenomenon has also been studied. |
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ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2019.03.010 |